[Artist's Concept of AXAF]

CXO Project Science:
Ion Studies

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Chandra
TRIM Ion Transmission Summary
(21 Oct 1999)


 
 

Synopsis:

Energy required for 50% proton transmission through:

 

 
 



Energy required for 50% oxygen ion transmission through:


Proton transmission through OBF-S only
OBF-S: 90 nm Al; 200 nm polyimide (1.34 g/cm^3); 30 nm Al
TRIMIonTrans1.gif TRIMIonTrans2.gif TRIMIonTrans3.gif

Proton transmission through OBF-I only
OBF-I: 130 nm Al; 200 nm polyimide (1.34 g/cm^3); 30 nm Al
TRIMIonTrans4.gif TRIMIonTrans5.gif TRIMIonTrans6.gif

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Proton transmission through OBF-S + ACIS-FI gate structure
OBF-S: 90 nm Al; 200 nm polyimide (1.34 g/cm^3); 30 nm Al
ACIS Gate Structure: 300 nm Si; 300 nm SiO2; 40 nm Si3N4
TRIMIonTrans7.gif TRIMIonTrans8.gif TRIMIonTrans9.gif
Proton transmission through OBF-I + ACIS-FI gate structure
OBF-I: 130 nm Al; 200 nm polyimide (1.34 g/cm^3); 30 nm Al
ACIS Gate Structure: 300 nm Si; 300 nm SiO2; 40 nm Si3N4
TRIMIonTrans10.gif TRIMIonTrans11.gif TRIMIonTrans12.gif
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Proton transmission through HEG substrate+OBF+ACIS-FI gate structure
HEG: 20 nm Au; 5 nm Cr; 1000 nm polyimide (1.34 g/cm^3)
OBF-S: 90 nm Al; 200 nm polyimide (1.34 g/cm^3); 30 nm Al
ACIS Gate Structure: 300 nm Si; 300 nm SiO2; 40 nm Si3N4
TRIMIonTrans13.gif TRIMIonTrans14.gif TRIMIonTrans15.gif
Proton transmission through MEG substrate+OBF+ACIS-FI gate structure
MEG: 20 nm Au; 5 nm Cr; 500 nm polyimide (1.34 g/cm^3)
OBF-S: 90 nm Al; 200 nm polyimide (1.34 g/cm^3); 30 nm Al
ACIS Gate Structure: 300 nm Si; 300 nm SiO2; 40 nm Si3N4
TRIMIonTrans16.gif TRIMIonTrans17.gif TRIMIonTrans18.gif
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Proton transmission through HEG substrate
TRIMIonTrans19.gif
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Oxygen ion transmission through OBF-S + ACIS-FI gate structure
OBF-S: 90 nm Al; 200 nm polyimide (1.34 g/cm^3); 30 nm Al
ACIS Gate Structure: 300 nm Si; 300 nm SiO2; 40 nm Si3N4
TRIMIonTrans20.gif TRIMIonTrans21.gif TRIMIonTrans22.gif
Oxygen ion transmission through OBF-I + ACIS-FI gate structure
OBF-I: 130 nm Al; 200 nm polyimide (1.34 g/cm^3); 30 nm Al
ACIS Gate Structure: 300 nm Si; 300 nm SiO2; 40 nm Si3N4
TRIMIonTrans23.gif TRIMIonTrans24.gif TRIMIonTrans25.gif
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Oxygen ion transmission through ACIS-FI gate structure

ACIS Gate Structure: 300 nm Si; 300 nm SiO2; 40 nm Si3N4
TRIMIonTrans26.gif TRIMIonTrans27.gif TRIMIonTrans28.gif
Oxygen ion transmission through MEG substrate+OBF+ACIS-FI gate structure
MEG: 20 nm Au; 5 nm Cr; 500 nm polyimide (1.34 g/cm^3)
OBF-S: 90 nm Al; 200 nm polyimide (1.34 g/cm^3); 30 nm Al
ACIS Gate Structure: 300 nm Si; 300 nm SiO2; 40 nm Si3N4
TRIMIonTrans29.gif TRIMIonTrans30.gif TRIMIonTrans31.gif
back to start
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